Fabrication of semiconductor Kagome lattice structure by selective area metalorganic vapor phase epitaxy
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چکیده
منابع مشابه
Metalorganic Chemical Vapor Deposition For Optoelectronic Devices - Proceedings of the IEEE
The metalorganic chemical vapor deposition (MOCVD) process for electronic and photonic compound semiconductor materials and devices is reviewed. We begin with an introduction to the basic MOCVD chemical reaction process, gas delivery equipment, reaction chambers, and safety. Growth mechanisms, including hydrodynamics, boundary-layer issues, thermal effects, and pyrolysis reactions, are defined,...
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